1、The sealing between the furnace body and the lid adopts two-way lock ring sealing structure to ensure the sealing of positive and negative pressure in both directions.

2、With the function of pressure separation, the pressure inside the furnace can be controlled automatically when heating (backfill ammonia or xenon gas and other inert gases) to prevent volatile elements in the workpiece from evaporating.

3、Furnace door is equipped with stirring fan to achieve convection heating function. During convection operation, good temperature uniformity in the heating chamber can be obtained.

4、The temperature measuring element adopts double-core thermocouples, one of which is used as the temperature feedback signal to be provided to the temperature controller to control the output power of the regulator: the other is used for over-temperature alarm.

5、Pressure sensing switch adopts digital display SMC intelligent components, and PLC connection can achieve automatic control.

6、Cooling fan adopts water-cooled high-power fan, which can be started freely in vacuum environment.

7、the temperature controller adopts Europe 2604 brand, to achieve automatic temperature control, adjustment, compensation function, in line with AMS2750E standard.

8、the control system supports network remote control and data transmission functions, remote troubleshooting, remote process debugging, etc., support for software upgrades and updates.

9、HIM adopts MCSG 15.6-inch industrial touch screen, production process management, information management, historical data curve query copy, intelligent fault analysis and alarm, real-time display of equipment operating status and other functions.

10、Heat exchanger adopts high finned copper heat exchanger. Large heat exchange area, high cooling efficiency.

11、water-cooled system with emergency water interface, power outages connected to the emergency water source.

12、Filling and discharging system is equipped with main inflatable channel, parallel auxiliary inflatable channel and automatic pressure distribution pipeline. According to the process requirements can be filled with ammonia, xenon and other inert protective gases.