Semiconductor diffusion furnace tube
All elements are available in both vertical and horizontal configurations, using a composite of a variety of refractory materials as the insulation materials, supplying a more uniform temperature field, as retrofits or for new applications.
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Specification
All diffusion tube heaters are available in two variations. One is the heavy gauge wire type elements, similar to most standard diffusion heating elements. Also available are low mass vacuum formed ceramic fiber heating elements.
Diffusion element accessories including standard and custom sized vestibule blocks are available as well as diffusion furnace collars and discs.
