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1700℃ CVD System
PECVD    View:356    date:2016/09/18    Back
 Purpose

Tube furnace CVD system, equipped with twin-rotary-vane vacuum pump, with four channels precision mass flow-controllers, the maximum temperature is up to 1700, vacuum up to 5×10-2 Torr, it can mix 1-4 gases. The furnace is new tool to research a CVD coating of variety of thin film.

Features:

l  Maximum working temperature is up to 1650

l  Long lasting operation temperature is up to 1600

l  High purity alumina tube with vacuum gauge, with resistance regulation, to ensure precision and convenient.

l  Double Shell Design with cooling system to Ensure Outside Furnace Temperature lower than 60

l  Gas flow meter: MFC1  0-100sccm

l  Gas flow meter: MFC2  0-200sccm

l  Gas flow meter: MFC3  0-200sccm

l  Gas flow meter: MFC4  0-500sccm

 

Type

Max. Temperature

(℃)

Tube Diameter

mm)

Length of Heating

mm)

Uniform Temperature Zone

mm

Length of Tube

mm

Outer Size(mm)

Power

Voltage

Material of Tube

Vacuum

(Pa)

Net Weight

KG)

Length

Width

Height

GSL-1200X

1200

506080100

300

200

10001200

1250

600

1680

4

AC:220V 50/60Hz

High Purity Alumina

GSL-1200X

1200

GSL-1400X

1400

506080100

300

200

10001200

1250

600

1680

4

AC:220V 50/60Hz

High Purity Alumina

GSL-1400X

1400

GSL-1600X

1600

506080100

300

200

10001200

1250

600

1680

4

AC:220V 50/60Hz

High Purity Alumina

GSL-1600X

1600